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Proceedings Paper

Actuation of polysilicon surface-micromachined mirrors
Author(s): Norman C. Tien; Meng-Hsiung Kiang; Michael J. Daneman; Olav Solgaard; Kam Y. Lau; Richard S. Muller
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Paper Abstract

Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning.

Paper Details

Date Published: 8 March 1996
PDF: 7 pages
Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234636
Show Author Affiliations
Norman C. Tien, Univ. of California/Berkeley (United States)
Meng-Hsiung Kiang, Univ. of California/Berkeley (United States)
Michael J. Daneman, Univ. of California/Berkeley (United States)
Olav Solgaard, Univ. of California/Davis (United States)
Kam Y. Lau, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 2687:
Miniaturized Systems with Micro-Optics and Micromechanics
M. Edward Motamedi, Editor(s)

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