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Proceedings Paper

Form measurement sensor for rotation reflecting surfaces
Author(s): Valentin N. Belopukhov; O. A. Zajakin; Vjacheslav N. Podvigin; Alexander F. Naumov
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Paper Abstract

It is considered the sensor which can measure a surface profile shape and a waviness as the space function. The optical head registering the local surface titles is applied in the sensor. The sensor is the adaptive action system. The device is classified as a coordinate-measurement tool.

Paper Details

Date Published: 1 March 1996
PDF: 5 pages
Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); doi: 10.1117/12.234234
Show Author Affiliations
Valentin N. Belopukhov, P. N. Lebedev Physical Institute (Russia)
O. A. Zajakin, P. N. Lebedev Physical Institute (Russia)
Vjacheslav N. Podvigin, P. N. Lebedev Physical Institute (Russia)
Alexander F. Naumov, P. N. Lebedev Physical Institute (Russia)


Published in SPIE Proceedings Vol. 2713:
Fifth International Conference on Industrial Lasers and Laser Applications '95
Vladislav Ya. Panchenko; Vladimir S. Golubev, Editor(s)

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