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Proceedings Paper

Soft x-ray spectro-microscope
Author(s): Juan Carlos Campuzano; Guy Jennings; L. Beaulaigue; Brian G. Rodricks; Christine M. Brizard
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Paper Abstract

An X-ray photoelectron microscope capable of providing both spatial and chemical information on the nature of a sample has been developed. Photons from the Aladdin Synchrotron are monochromatized by an extended-range Grasshopper monochromator covering the range from 40 to 1500 eV with an energy resolution between 10 and 200 meV. The monochromatized radiation generates photoelectrons in the sample, which is energy-analyzed with a resolving power E/delta E greater than 50,000 and imaged by a multichannel plate array. The visible image is transferred to a computer by a virtual-phase charge-coupled device camera with a dynamic range of 4096:1. Preliminary coarse measurements indicate a spatial resolution of the instrument better than 1 micron, although a limit of 600 A is possible. The instrument provides chemical shift-resolved images of low-lying core levels in a variety of samples.

Paper Details

Date Published: 1 January 1991
PDF: 10 pages
Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); doi: 10.1117/12.23317
Show Author Affiliations
Juan Carlos Campuzano, Argonne National Lab. and Univ. of Illinois/Chicago (United States)
Guy Jennings, Argonne National Lab. (United States)
L. Beaulaigue, Argonne National Lab. (United States)
Brian G. Rodricks, Argonne National Lab. (United States)
Christine M. Brizard, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 1345:
Advanced X-Ray/EUV Radiation Sources and Applications
James P. Knauer; Gopal K. Shenoy, Editor(s)

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