Proceedings Paper
EUV performance of a multilayer-coated high-density toroidal grating| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
Performance of a multilayer coated diffraction grating has been evaluated in the
EUV. The application of a multilayer coating to a blazed toroidal grating of high
ruling density has produced a significant enhancement in grating efficiency in the
30 run spectral region in first order and has maintained the excellent quasi
stigmatic spectral resolution of the grating.
Paper Details
Date Published: 1 February 1991
PDF: 10 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23233
Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
PDF: 10 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23233
Show Author Affiliations
Ritva A. M. Keski-Kuha, NASA/Goddard Space Flight Ctr. (United States)
Roger J. Thomas, NASA/Goddard Space Flight Ctr. (United States)
Werner M. Neupert, NASA/Goddard Space Flight Ctr. (United States)
Roger J. Thomas, NASA/Goddard Space Flight Ctr. (United States)
Werner M. Neupert, NASA/Goddard Space Flight Ctr. (United States)
Charles E. Condor, NASA/Goddard Space Flight Ctr. (United States)
Jeffrey S. Gum, NASA/Goddard Space Flight Ctr. (United States)
Jeffrey S. Gum, NASA/Goddard Space Flight Ctr. (United States)
Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
© SPIE. Terms of Use
