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Proceedings Paper

Photoablation of a graphite target using a KrF excimer laser and application to deposition of hard-carbon thin films
Author(s): Alain Catherinot; C. Germain; J. Aubreton
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Paper Abstract

The plasma plume created during the interaction of a KrF laser beam (248 nm) with a graphite target under high-vacuum conditions has been investigated using temporally and spatially resolved spectroscopy and time-of-flight charged particle detection. Measurements lead to information on nature and kinetic energy of ejected particles. Hard carbon films are deposited on various substrates located in front to the target and their properties are investigated. These properties are found close to those of diamond (hardness equals 80 GPa, infrared transparency greater than 90%) when deposition temperature is low (less than 100 degrees Celsius).

Paper Details

Date Published: 11 March 1996
PDF: 9 pages
Proc. SPIE 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics, (11 March 1996); doi: 10.1117/12.232205
Show Author Affiliations
Alain Catherinot, Uer des Sciences (France)
C. Germain, Uer des Sciences (France)
J. Aubreton, Uer des Sciences (France)

Published in SPIE Proceedings Vol. 2777:
ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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