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Proceedings Paper

Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards
Author(s): Valeriy V. Yashchuk; Sergey Babin; Stefano Cabrini; Ulf Griesmann; Ian Lacey; Keiko Munechika; Carlos Pina-Hernandez; Quandou Wang
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Paper Abstract

Recently, a technique for calibration of the Modulation Transfer Function (MTF) of a broad variety of metrology instrumentation has been established. The technique is based on test samples structured according to binary pseudorandom (BPR) one-dimensional sequences and two-dimensional arrays. The inherent power spectral density of BPR gratings and arrays, has a deterministic white-noise-like character that allows a direct determination of the MTF with a uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. As such, the BPR samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error. Here we discuss our recent developments working with support of the U.S. Department of Energy on industrialization of the technique. The goal is to develop affordable BPR test samples, application procedures, and data processing software, suitable for thorough characterization of optical interferometers and microscopes, as well as x-ray, electron (scanning and transmission), and atomic force microscopes. We report on the development of BPR array test samples optimized for advanced characterization (including the instrumental MTF and aberrations) and operation optimization of large aperture optical interferometers. We describe the sample fabrication process and tests to verify the compliance to desired surface topography. The data acquisition and analysis procedures for application of the technique for precise focusing of Fizeau interferometer are discussed in detail.

Paper Details

Date Published: 18 August 2018
PDF: 13 pages
Proc. SPIE 10749, Interferometry XIX, 107490R (18 August 2018); doi: 10.1117/12.2322011
Show Author Affiliations
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Sergey Babin, aBeam Technologies, Inc. (United States)
Stefano Cabrini, Lawrence Berkeley National Lab. (United States)
Ulf Griesmann, National Institute of Standards and Technology (United States)
Ian Lacey, Lawrence Berkeley National Lab. (United States)
Keiko Munechika, aBeam Technologies, Inc. (United States)
Carlos Pina-Hernandez, aBeam Technologies, Inc. (United States)
Quandou Wang, ASPAC Technologies LLC (United States)

Published in SPIE Proceedings Vol. 10749:
Interferometry XIX
Katherine Creath; Jan Burke; Michael B. North Morris; Angela D. Davies, Editor(s)

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