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Proceedings Paper

Processing issues and technologies for optoelectronics-integrated circuits and devices (invited)
Author(s): G. Allen Vawter
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Paper Abstract

The influence of processing on the design of optical devices and optoelectronic integrated circuits is discussed. Process compatibility of devices used as the basis of a complete optoelectronic integrated circuit will be discussed along with some potential optoelectronic integrated circuits employing only phase modulators and couplers. Specific examples of the application of reactive-ion-beam etching in the formation of passive optical waveguide phase modulators, optical interconnects, turning mirrors, and output couplers in GaAs/AlGaAs are given.

Paper Details

Date Published: 1 December 1992
Proc. SPIE 1582, Integrated Optoelectronics for Communication and Processing, (1 December 1992); doi: 10.1117/12.2321800
Show Author Affiliations
G. Allen Vawter, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 1582:
Integrated Optoelectronics for Communication and Processing
C.-S. Hong, Editor(s)

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