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Proceedings Paper

Epitaxial liftoff technology
Author(s): E. Yablonovitch
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Paper Abstract

Epitaxial liftoff permits the integration of III-V films and devices onto arbitrary material substrates. This paper will review Bellcore's work on opto-electronic integration of III-V optical transmitter and receiver devices onto LiNbO3, glass, Silicon and sapphire substrates.

Paper Details

Date Published: 1 December 1991
Proc. SPIE 1563, Optical Enhancements to Computing Technology, (1 December 1991); doi: 10.1117/12.2321749
Show Author Affiliations
E. Yablonovitch, Navesink Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1563:
Optical Enhancements to Computing Technology
John A. Neff, Editor(s)

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