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Proceedings Paper

XUV characterization comparison of Mo/Si multilayer coatings
Author(s): David L. Windt; Warren K. Waskiewicz; Glenn D. Kubiak; Troy W. Barbee Jr.; Richard N. Watts
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Paper Abstract

The reflectances of seven Mo/Si multilayer coatings have been measured using three different reflectometers in order to determine whether reflectance measurements made using different reflectometers yield consistent results. By comparing the deduced adjustable parameters used to fit the measured reflectances with those calculated from a model based on recursive application of the modified Fresnel equations, it is concluded that the measurements made with the three reflectometers are inconsistent. The discrepancies are attributed to systematic measurement errors, including those associated with the spectral purity of the incident radiation.

Paper Details

Date Published: 1 February 1991
PDF: 9 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23200
Show Author Affiliations
David L. Windt, AT&T Bell Labs. (United States)
Warren K. Waskiewicz, AT&T Bell Labs. (United States)
Glenn D. Kubiak, Sandia National Labs. (United States)
Troy W. Barbee Jr., Lawrence Livermore National Lab. (United States)
Richard N. Watts, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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