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Proceedings Paper

Phase shift strategies in phase shifting time averaging interferometry for harmonic motion measurements
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Paper Abstract

Classical time-averaging is widely used for MEMS/MOEMS dynamic behavior investigations. In order to evaluate the information on maximum amplitude at a given load of vibrating object one needs to evaluate the argument of Bessel function that encodes the useful information. For this purpose many different approaches were presented. Among them Temporal Phase Shifting applied to Bessel fringes is of special interest since it provides most accurate results. It, however, requires additional cumbersome pixelwise correction routine via specially designed look-up-table. In this paper we investigate, through extensive numerical simulations, the possibility of reduction of phase evaluation error (without correction routine) by different strategies of phase shifting. Two different 5 step algorithms are investigated for that purpose. Additionally, quick and robust correction procedure based on evaluated phase distribution is presented.

Paper Details

Date Published: 7 September 2018
PDF: 11 pages
Proc. SPIE 10834, Speckle 2018: VII International Conference on Speckle Metrology, 108342C (7 September 2018); doi: 10.1117/12.2319769
Show Author Affiliations
Adam Styk, Warsaw Univ. of Technology (Poland)
Helena Dziubecka, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 10834:
Speckle 2018: VII International Conference on Speckle Metrology
Malgorzata Kujawińska; Leszek R. Jaroszewicz, Editor(s)

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