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Proceedings Paper

Performance of multilayer-coated figured optics for soft x-rays near the diffraction limit
Author(s): Eric L. Raab; Donald M. Tennant; Warren K. Waskiewicz; Alastair A. MacDowell; Richard R. Freeman
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Paper Abstract

The imaging performance of a spherical mirror was measured at 14nm. A Foucault knife-edge test was used to determine the focal spot size formed by a 400 mm radius mirror at a numerical aperture of 0.04. The image formed by the mirror is compared with a single-layer AuPd coating is compared with that formed when coated with a Mo/Si multilayer. By fitting the results with a diffraction model, it is possible to quantify the change in effective surface figure caused by the multilayer. It is concluded that a multilayer-coated mirror can perform at the diffraction limit under certain conditions.

Paper Details

Date Published: 1 February 1991
PDF: 6 pages
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23183
Show Author Affiliations
Eric L. Raab, AT&T Bell Labs. (United States)
Donald M. Tennant, AT&T Bell Labs. (United States)
Warren K. Waskiewicz, AT&T Bell Labs. (United States)
Alastair A. MacDowell, AT&T Bell Labs. (United States)
Richard R. Freeman, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1343:
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

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