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Proceedings Paper

Characterizing the resolving power of laser Fizeau interferometers
Author(s): Torsten Glaschke; Leslie L. Deck; Peter J. de Groot
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Paper Abstract

Optical fabrication relies on precision metrology over a wide range of lateral scales. Consequently, an important performance parameter for Fizeau interferometers is the instrument transfer function (ITF), which specifies the system response as a function of surface spatial frequency. Advances in test procedures, instruments and automated analysis techniques now enable reliable ITF characterization independent of many traditional sources of error. Results here show the ITF for a commercial 100-mm aperture interferometer with spatial frequency response ranging from 0 to 1500 cycles per aperture

Paper Details

Date Published: 7 August 2018
PDF: 6 pages
Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 1082905 (7 August 2018); doi: 10.1117/12.2317630
Show Author Affiliations
Torsten Glaschke, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)
Peter J. de Groot, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 10829:
Fifth European Seminar on Precision Optics Manufacturing
Rolf Rascher; Christian Schopf, Editor(s)

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