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Proceedings Paper

An approach to developing a Fabry-Perot filter by a single fabrication step for gas sensing applications
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Paper Abstract

In this work, an influential approach has been presented for the fabrication of an interference filter. The construction of such filters turns the layer stack assembly on its one side which makes it possible to use air as a low index material. All the layers of a particular material (high index) are deposited at the same time which transforms the layer thickness into line thickness and is obtained by patterning the filters using photolithography. This results in the formation of a complex filter design with high volume and low production cost.

Paper Details

Date Published: 6 June 2018
PDF: 8 pages
Proc. SPIE 10774, Optical Technologies in Telecommunications 2017, 107740P (6 June 2018); doi: 10.1117/12.2316482
Show Author Affiliations
M. A. Butt, Samara National Research Univ. (Russian Federation)
Yu. S. Strelkov, Samara National Research Univ. (Russian Federation)
Image Processing Systems Institute (Russian Federation)

Published in SPIE Proceedings Vol. 10774:
Optical Technologies in Telecommunications 2017
Vladimir A. Andreev; Anton V. Bourdine; Vladimir A. Burdin; Oleg G. Morozov; Albert H. Sultanov, Editor(s)

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