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Proceedings Paper

Investigations of x-ray emission from a laser-irradiated gas puff target
Author(s): Henryk Fiedorowicz
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Paper Abstract

A plasma produced by high power laser irradiation of a solid target emits strong X-ray radiation in low photon-energy range (soft X-rays and MN radiation) and is considered to be used in many applications such as X-ray optics, material science, microlithography, and biology1-5. A great disadvantage of the laser plasma X-ray sources is the production of target debris by the laser plasma, that may damage optics and X-ray exposed specimens placed in the interaction chamber. To avoid the debris production we have proposed to irradiate, instead of a solid target, a gas puff target, formed by pulsed injection of a small amount of gas into a laser focus region6-8. Our further studies concentrated on optimization of X-ray production from laser-irradiated xenon gas puff targets in 1-keV photon-energy range for X-ray lithography applications9,10.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778G7 (1 September 1996); doi: 10.1117/12.2316272
Show Author Affiliations
Henryk Fiedorowicz, Military Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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