Discharged-pumped excimer lasers[1] with a compact type[2], high repetition rate[3], long life time operation[4] are required for the laser sources for lidar application[5]. The physical conditions include, above all, the retention of homogenity of the discharge volume at a high pulse repetition frequency for this laser. This is usually done by replacing the gas in the electrode gap which refines circulation by various fan systems. The stable discharge and the high velocity of a few ten m/s are necessary for the kHz order repetition-rate laser[6]. For this purpose, we have developed a compact KrF excimer laser of cylindrical cage structure and investigated the characteristics of laser output, repetitive operation and long life from this system.

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27788P (1 September 1996); doi: 10.1117/12.2316002

Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)