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Proceedings Paper

Study on the convex dual-blazed grating
Author(s): Quan Liu; Jianhong Wu; Peiliang Guo; Feng Zhou
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Paper Abstract

The high diffraction efficiency of the convex blazed gratings cannot be realized in the broadband. Therefore, we have designed the convex dual-blazed grating to realize higher and uniform diffraction efficiency in the wavelength from 0.4 μm to 2.5 μm. The diffraction efficiency of the convex dual-blazed grating is investigated by using rigorous coupled wave analysis. The results show: when the two blaze angles of the convex dual-blazed grating, one within the range from 2.7 degree to 3.4 degree and the other one within the range from 8 degree to 9 degree respectively, the first-order diffraction efficiency is more than 25 percent at the visible-near infrared band. The convex dual-blazed grating with the period of 5μm in the center will be fabricated by holographic lithography-segmented ion beam etching in late 2017.

Paper Details

Date Published: 20 February 2018
PDF: 6 pages
Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106972G (20 February 2018); doi: 10.1117/12.2315485
Show Author Affiliations
Quan Liu, Soochow Univ. (China)
Jianhong Wu, Soochow Univ. (China)
Peiliang Guo, Soochow Univ. (China)
Feng Zhou, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 10697:
Fourth Seminar on Novel Optoelectronic Detection Technology and Application
Weiqi Jin; Ye Li, Editor(s)

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