In this paper the diffraction characteristics of the blazed grating is investigated by using rigorous coupled-wave analysis, which indicates that within the near infrared broadband, the first-order diffraction efficiency can be over 10% at 1.2μm and over 65% at 2.3μm through controlling the blaze angle of the blazed grating. The blazed grating with the period of 8.33μm, the blaze angle about 7.3 degree, and the antiblaze angle about 41.8 degree has been fabricated by holographic lithography - ion beam etching. Theoretical analysis has showed that the diffraction efficiency of these blazed grating can reach 15% at 1.2μm, 73% at 2.3μm and 75% at blazed wavelength.

Date Published: 20 February 2018
PDF: 6 pages
Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106974X (20 February 2018); doi: 10.1117/12.2315244

Published in SPIE Proceedings Vol. 10697:
Fourth Seminar on Novel Optoelectronic Detection Technology and Application
Weiqi Jin; Ye Li, Editor(s)