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Proceedings Paper

Optimizing the efficiency of Fabry-Perot interferometers with silicon-substrate mirrors
Author(s): Nicholas F. Cothard; Mahiro Abe; Thomas Nikola; Gordon J. Stacey; German Cortes-Medellin; Patricio A. Gallardo; Brian J. Koopman; Michael D. Niemack; Stephen C. Parshley; Eve M. Vavagiakis; Kenny Vetter
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Paper Abstract

We present the novel design of microfabricated, silicon-substrate based mirrors for use in cryogenic Fabry-Perot Interferometers (FPIs) for the mid-IR to sub-mm/mm wavelength regime. One side of the silicon substrate will have a double-layer metamaterial anti-reflection coating (ARC) anisotropically etched into it and the other side will be metalized with a re ective mesh pattern. The double-layer ARC ensures a re ectance of less than 1% at the surface substrate over the FPI bandwidth. This low reflectance is required to achieve broadband capability and to mitigate contaminating resonances from the silicon surface. Two silicon substrates with their metalized surfaces facing each other and held parallel with an adjustable separation will compose the FPI. To create an FPI with nearly uniform finesse over the FPI bandwidth, we use a combination of inductive and capacitive gold meshes evaporated onto the silicon substrate. We also consider the use of niobium as a superconducting reflective mesh for long wavelengths to eliminate ohmic losses at each reflection in the resonating cavity of the FPI and thereby increase overall transmission. We develop these silicon-substrate based FPIs for use in ground (e.g. CCAT-prime), air (e.g. HIRMES), and future space-based telescopes (e.g. the Origins Space Telescope concept). Such FPIs are well suited for spectroscopic imaging with the upcoming large IR/sub-mm/mm TES bolometer detector arrays. Here we present the fabrication and performance of multi-layer, plasma-etched, silicon metamaterial ARC, as well as models of the mirrors and FPIs.

Paper Details

Date Published: 10 July 2018
PDF: 9 pages
Proc. SPIE 10706, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III, 107065B (10 July 2018); doi: 10.1117/12.2313483
Show Author Affiliations
Nicholas F. Cothard, Cornell Univ. (United States)
Mahiro Abe, Cornell Univ. (United States)
Thomas Nikola, Cornell Univ. (United States)
Gordon J. Stacey, Cornell Univ. (United States)
German Cortes-Medellin, Cornell Univ. (United States)
Patricio A. Gallardo, Cornell Univ. (United States)
Brian J. Koopman, Cornell Univ. (United States)
Michael D. Niemack, Cornell Univ. (United States)
Stephen C. Parshley, Cornell Univ. (United States)
Eve M. Vavagiakis, Cornell Univ. (United States)
Kenny Vetter, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 10706:
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III
Ramón Navarro; Roland Geyl, Editor(s)

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