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Proceedings Paper • Open Access

NANOMEFOS non-contact measurement machine for aspheric and freeform optics
Author(s): R. Henselmans; G. P. H. Gubbels; C. van Drunen; B. van Venrooy; J.A.P. Leijtens

Paper Abstract

Applying freeform optics in high-end optical systems can improve system performance while decreasing the system mass, size and number of required components. Their widespread application is however held back by the lack of a suitable metrology method. TNO, TU/e and NMi VSL have therefore developed the NANOMEFOS measurement machine [1], capable of universal non-contact and fast measurement of aspherical and freeform optics ranging from convex to concave and from flat to freeform, up to ⊘500 mm, with an uncertainty below 30 nm (2σ).

Paper Details

Date Published: 20 November 2017
PDF: 6 pages
Proc. SPIE 10565, International Conference on Space Optics — ICSO 2010, 1056525 (20 November 2017); doi: 10.1117/12.2309250
Show Author Affiliations
R. Henselmans, TNO Science and Industry (Netherlands)
G. P. H. Gubbels, TNO Science and Industry (Netherlands)
C. van Drunen, TNO Science and Industry (Netherlands)
B. van Venrooy, TNO Science and Industry (Netherlands)
J.A.P. Leijtens, TNO Science and Industry (Netherlands)

Published in SPIE Proceedings Vol. 10565:
International Conference on Space Optics — ICSO 2010
Errico Armandillo; Bruno Cugny; Nikos Karafolas, Editor(s)

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