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Proceedings Paper • Open Access

Dimensional stability validation and sensor calibration with sub-nanometer accuracy

Paper Abstract

We report on the development of measurement facilities for the calibration of ultra-precision displacement sensors and for the dimensional stability validation of materials, joint structures and sensors. A Fabry-Pérot interferometer and a double-ended heterodyne interferometer are discussed, both with a dedicated design aiming for sub-nanometer displacement measurement accuracy.

Paper Details

Date Published: 20 November 2017
PDF: 6 pages
Proc. SPIE 10564, International Conference on Space Optics — ICSO 2012, 105643K (20 November 2017); doi: 10.1117/12.2309057
Show Author Affiliations
Dirk Voigt, VSL Dutch Metrology Institute (Netherlands)
Rob H. Bergmans, VSL Dutch Metrology Institute (Netherlands)

Published in SPIE Proceedings Vol. 10564:
International Conference on Space Optics — ICSO 2012
Bruno Cugny; Errico Armandillo; Nikos Karafolas, Editor(s)

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