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Proceedings Paper • Open Access

Advanced uncooled infrared focal plane development at CEA/LETI

Paper Abstract

LETI/LIR has been involved for a few year in the field of uncooled detectors and has chosen amorphous silicon for its microbolometer technology development. Uncooled IR detectors pave the way to reduced weight systems aboard satellites. The silicon compatibility of our thermometer is a key parameter which has enabled a very fast technology development and transfer to industry. This competitive technology is now able to provide a new approach for IR detectors for space applications.

This paper presents the main characteristics of the CEA / LETI technology which is based on a monolithically integrated structure over a fully completed readout circuit from a commercially available 0.5 μm design rules CMOS line. The technology maturity will be illustrated by the results obtained at LETI/LIR and SOFRADIR on a 320 x 240 with a pitch of 45 μm. First improvement on device reliability and characterization results will be presented.

Paper Details

Date Published: 21 November 2017
PDF: 11 pages
Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 1056902 (21 November 2017); doi: 10.1117/12.2307954
Show Author Affiliations
Jean-Luc Tissot, LETI (CEA) (France)
Eric Mottin, LETI (CEA) (France)
Jean-Luc Martin, LETI (CEA) (France)
Jean-Jacques Yon, LETI (CEA) (France)
Michel Vilain, LETI (CEA) (France)

Published in SPIE Proceedings Vol. 10569:
International Conference on Space Optics — ICSO 2000
Georges Otrio, Editor(s)

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