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Proceedings Paper • Open Access

MEMS deformable mirror for wavefront correction of large telescopes
Author(s): Sigmund Manhart; Gleb Vdovin; Neil Collings; Zoran Sodnik; Susanne Nikolov; Werner Hupfer

Paper Abstract

A 50 mm diameter membrane mirror was designed and manufactured at TU Delft. It is made from bulk silicon by micromachining - a technology primarily used for micro-electromechanical systems (MEMS). The mirror unit is equipped with 39 actuator electrodes and can be electrostatically deformed to correct wavefront errors in optical imaging systems. Performance tests on the deformable mirror were carried out at Astrium GmbH using a breadboard setup with a wavefront sensor and a closed-loop control system. It was found that the deformable membrane mirror is well suited for correction of low order wavefront errors as they must be expected in lightweighted space telescopes.

Paper Details

Date Published: 21 November 2017
PDF: 10 pages
Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 1056918 (21 November 2017); doi: 10.1117/12.2307868
Show Author Affiliations
Sigmund Manhart, Astrium GmbH (Germany)
Gleb Vdovin, TU Delft (Netherlands)
Neil Collings, Univ. Neuchatel (Switzerland)
Zoran Sodnik, ESA-ESTEC (Netherlands)
Susanne Nikolov, Astrium GmbH (Germany)
Werner Hupfer, Astrium GmbH (Germany)

Published in SPIE Proceedings Vol. 10569:
International Conference on Space Optics — ICSO 2000
Georges Otrio, Editor(s)

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