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Proceedings Paper

Exploiting silicon oxycarbides for integrated photonic applications
Author(s): Faisal Ahmed Memon; Francesco Morichetti; Andrea Melloni
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Paper Abstract

We report on the characteristics of silicon oxycarbide films deposited by reactive radio frequency magnetron sputtering of a silicon carbide target in the presence of argon and oxygen gases. Quantitative characterization of the silicon oxycarbide films is performed extensively by ellipsometry, scanning electron microscopy and atomic force microscopy. Integrated photonic waveguides are demonstrated in silicon oxycarbide films.

Paper Details

Date Published: 17 May 2018
PDF: 7 pages
Proc. SPIE 10683, Fiber Lasers and Glass Photonics: Materials through Applications, 106832T (17 May 2018); doi: 10.1117/12.2306624
Show Author Affiliations
Faisal Ahmed Memon, Politecnico di Milano (Italy)
Mehran Univ. of Engineering & Technology (Pakistan)
Francesco Morichetti, Politecnico di Milano (Italy)
Andrea Melloni, Politecnico di Milano (Italy)

Published in SPIE Proceedings Vol. 10683:
Fiber Lasers and Glass Photonics: Materials through Applications
Stefano Taccheo; Jacob I. Mackenzie; Maurizio Ferrari, Editor(s)

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