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Proceedings Paper

Applications of noncontacting surface measurement in micromechanics
Author(s): Alistair J.C. Brown
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Paper Abstract

Micromechanics is placing new demands on surface metrology equipment due to the fragility and small size of the mechanical components being fabricated. For research and development purposes both static measurement of component dimensions and thickness and dynamic measurements of deflection and vibrational amplitude are essential. This paper describes a new laser based non-contacting surface measurement system which is finding increasing application for these tasks. The system employs the dynamic focusing principle and has a measurement range of 1000 micrometers and a vertical resolution of 6 nm. The lateral resolution of the system is 1 micrometer and measurements may be made at up to 10 KHz. A built in observation window allows simultaneous measurement and observation of the measurement spot and surrounding region.

Paper Details

Date Published: 19 January 1996
PDF: 7 pages
Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); doi: 10.1117/12.230396
Show Author Affiliations
Alistair J.C. Brown, UBM Messtechnik GmbH (Germany)

Published in SPIE Proceedings Vol. 2599:
Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology
Michael R. Descour; Kevin G. Harding; Donald J. Svetkoff, Editor(s)

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