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Proceedings Paper

Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Author(s): Maiko Girschikofsky; Manuel Rosenberger; Michael Förthner; Mathias Rommel; Lothar Frey; Ralf Hellmann
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Paper Abstract

We report on the fabrication of an optical, highly-flexible thin film bending sensor which is based on diffused channel waveguide Bragg gratings inscribed into sheets of OrmoStamp hybrid polymers. The inorganic-organic Ormocer thin films are prepared by non-structured UV-enhanced imprint lithography which allows the fabrication of sheet-like slab substrates with a desired thickness. By this approach, 120 μm thin and highly-flexible plane-parallel substrates are achieved. For the inscription of the diffused channel waveguide Bragg gratings, a fast and efficient single writing step concept is applied, which allows the simultaneous inscription of both waveguide and Bragg grating in only a few seconds. The accordingly fabricated waveguide Bragg gratings feature a defined Bragg reflection peak that lies within the telecom wavelength range and is well-suited for sensing applications that require a reliable detection and tracking of the reflected Bragg wavelength. The applicability of the thus achieved devices as highly-flexible thin film bending sensors is investigated by means of deflection measurements. Here, we found a quasi-instantaneous and highly-reproducible response of the diffused channel waveguide Bragg gratings reflected Bragg wavelength to even small deflections which features a linear dependency of 6.05 × 10-4 nm/μm on the sensors displacement.

Paper Details

Date Published: 9 May 2018
PDF: 6 pages
Proc. SPIE 10680, Optical Sensing and Detection V, 106800P (9 May 2018); doi: 10.1117/12.2303820
Show Author Affiliations
Maiko Girschikofsky, Hochschule Aschaffenburg (Germany)
Manuel Rosenberger, Hochschule Aschaffenburg (Germany)
Michael Förthner, Friedrich-Alexander-Univ. Erlangen-Nuremberg (Germany)
Mathias Rommel, Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (Germany)
Lothar Frey, Friedrich-Alexander Univ. Erlangen-Nuremberg (Germany)
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (Germany)
Ralf Hellmann, Hochschule Aschaffenburg (Germany)

Published in SPIE Proceedings Vol. 10680:
Optical Sensing and Detection V
Francis Berghmans; Anna G. Mignani, Editor(s)

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