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Proceedings Paper

Deposition and analysis of carbon and silicon clusters generated by laser-induced gas phase reaction
Author(s): M. Ehbreht
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Paper Abstract

Laser driven gas-phase synthesis in a flow reactor was employed for the production of carbon and silicon cluster beams starting from gaseous compounds. It is based on a CO2-laser-induced decomposition of molecular gases containing carbon and silicon, such as C2H2 and SiH4. By introducing a skimmer into the reaction zone, the generated clusters are transferred to the free molecular flow and analyzed with a time-of-flight mass spectrometer. These clusters were deposited on a silicon or saphire target at room temperature. Micro-Raman spectroscopy techniques was used for- characterization of this deposits. The present studies show that the laser-driven nucleation in a flow reactor is a powerful technique to produce fullerenes and silicon quantum dots and other nano-size semiconductors or high-temperature evaporated materials.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782B (1 September 1996); doi: 10.1117/12.2298965
Show Author Affiliations
M. Ehbreht, Max-Plank Institute fur Stromungsforschung (Germany)

Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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