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Proceedings Paper

Assembly and adjustment of a lithographic lens
Author(s): U. Kruger
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Paper Abstract

The imaging performance of projection lenses is strongly influenced by the used tools and procedures of assembly and adjustment. This paper presents the experience we have, using the example of a wide-field g-line lens.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781Z (1 September 1996); doi: 10.1117/12.2298953
Show Author Affiliations
U. Kruger, JENOPTIK Laser, Optik, Systeme GmbH (Germany)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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