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Proceedings Paper

Optical surface topography measurements and characterization
Author(s): H. J. Tiziani
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Paper Abstract

For surface topography measurement and characterization it is necessary to calibrate the measuring devices. For comparison of measurements using different techniques it is important to specify the spatial frequency range of the microstructure. Two new methods for the measurements of surface shape and microstructure will be described; namely a confocal technique based on microlens arrays and an interferometrical technique based on heterodyne interferometry.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781X (1 September 1996); doi: 10.1117/12.2298951
Show Author Affiliations
H. J. Tiziani, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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