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Proceedings Paper

Using of vitreous chalcogenide semiconductors in microelectronic fabrication
Author(s): Lev M. Panasyuk
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Paper Abstract

This report describes the application of thin film Vitreous Chalcogenide Semiconduc- tors (VCS) for high resolution recording of the integrated elements. The processes of selective chemical etching of VCS layers are investigated both of the exposure conditions and parameter of etching solution.

Paper Details

Date Published: 1 September 1996
PDF: 2 pages
Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781N (1 September 1996); doi: 10.1117/12.2298941
Show Author Affiliations
Lev M. Panasyuk, State Univ. of Moldova (Moldova)


Published in SPIE Proceedings Vol. 2778:
17th Congress of the International Commission for Optics: Optics for Science and New Technology
Joon-Sung Chang; Jai-Hyung Lee; ChangHee Nam, Editor(s)

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