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Proceedings Paper

Characterisation of hydrogenated silicon nitride films by low temperature FTIR spectroscopy
Author(s): M. M. Pradhan
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Paper Abstract

Low temperature FTIR spectroscopy of hydrogenated siliconnitride films revealed many molecular species which are notobserved at ambient temperature. The broad band at 700-1100 cnisplits into three bands at 744, 825 and 890 cm-1 at 50K. Similar- ly NH group gives strong absorption band at low temperature.

Paper Details

Date Published: 30 November 2017
PDF: 2 pages
Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210473 (30 November 2017); doi: 10.1117/12.2298687
Show Author Affiliations
M. M. Pradhan, National Physical Lab. (India)

Published in SPIE Proceedings Vol. 2104:
18th International Conference on Infrared and Millimeter Waves
James R. Birch; Terence J. Parker, Editor(s)

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