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Proceedings Paper

X-ray EM simulation tool for ptychography dataset construction
Author(s): L. Pjotr Stoevelaar; Giampiero Gerini
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Paper Abstract

In this paper, we present an electromagnetic full-wave modeling framework, as a support EM tool providing data sets for X-ray ptychographic imaging. Modeling the entire scattering problem with Finite Element Method (FEM) tools is, in fact, a prohibitive task, because of the large area illuminated by the beam (due to the poor focusing power at these wavelengths) and the very small features to be imaged. To overcome this problem, the spectrum of the illumination beam is decomposed into a discrete set of plane waves. This allows reducing the electromagnetic modeling volume to the one enclosing the area to be imaged. The total scattered field is reconstructed by superimposing the solutions for each plane wave illumination.

Paper Details

Date Published: 13 March 2018
PDF: 6 pages
Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105850Q (13 March 2018); doi: 10.1117/12.2297200
Show Author Affiliations
L. Pjotr Stoevelaar, Eindhoven Univ. of Technology (Netherlands)
TNO (Netherlands)
Giampiero Gerini, Eindhoven Univ. of Technology (Netherlands)
TNO (Netherlands)

Published in SPIE Proceedings Vol. 10585:
Metrology, Inspection, and Process Control for Microlithography XXXII
Vladimir A. Ukraintsev, Editor(s)

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