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Proceedings Paper • Open Access

Mechanical stress in dielectric mirrors: towards a fine control of the flatness

Paper Abstract

Today, the demand on flat optical components with specification on final surface flatness that must be smaller than ?/20 or ?/30 peak to valley, for various applications including linear accelerators [1,2], space applications [3]…, needs an accurate knowledge on the mechanical stress induced in thin films. In order to design correctly stacks of thin films on both side of a substrate and achieve perfect stress compensation, it is thus obvious that the first step is to precisely characterize the stress in single layers.

Paper Details

Date Published: 25 September 2017
PDF: 7 pages
Proc. SPIE 10562, International Conference on Space Optics — ICSO 2016, 105621F (25 September 2017); doi: 10.1117/12.2296090
Show Author Affiliations
Thomas Begou, Institut Fresnel (France)
Julien Lumeau, Institut Fresnel (France)

Published in SPIE Proceedings Vol. 10562:
International Conference on Space Optics — ICSO 2016
Bruno Cugny; Nikos Karafolas; Zoran Sodnik, Editor(s)

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