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Proceedings Paper

Design optimization of highly asymmetrical layouts by 2D contour metrology
Author(s): C. M. Hu; Fred Lo; Elvis Yang; T. H. Yang; K. C. Chen
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Paper Abstract

As design pitch shrinks to the resolution limit of up-to-date optical lithography technology, the Critical Dimension (CD) variation tolerance has been dramatically decreased for ensuring the functionality of device. One of critical challenges associates with the narrower CD tolerance for whole chip area is the proximity effect control on asymmetrical layout environments. To fulfill the tight CD control of complex features, the Critical Dimension Scanning Electron Microscope (CD-SEM) based measurement results for qualifying process window and establishing the Optical Proximity Correction (OPC) model become insufficient, thus 2D contour extraction technique [1-5] has been an increasingly important approach for complementing the insufficiencies of traditional CD measurement algorithm. To alleviate the long cycle time and high cost penalties for product verification, manufacturing requirements are better to be well handled at design stage to improve the quality and yield of ICs. In this work, in-house 2D contour extraction platform was established for layout design optimization of 39nm half-pitch Self-Aligned Double Patterning (SADP) process layer. Combining with the adoption of Process Variation Band Index (PVBI), the contour extraction platform enables layout optimization speedup as comparing to traditional methods. The capabilities of identifying and handling lithography hotspots in complex layout environments of 2D contour extraction platform allow process window aware layout optimization to meet the manufacturing requirements.

Paper Details

Date Published: 13 March 2018
PDF: 10 pages
Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 105852I (13 March 2018); doi: 10.1117/12.2292851
Show Author Affiliations
C. M. Hu, Macronix International Co., Ltd. (Taiwan)
Fred Lo, Macronix International Co., Ltd. (Taiwan)
Elvis Yang, Macronix International Co., Ltd. (Taiwan)
T. H. Yang, Macronix International Co., Ltd. (Taiwan)
K. C. Chen, Macronix International Co., Ltd. (Taiwan)

Published in SPIE Proceedings Vol. 10585:
Metrology, Inspection, and Process Control for Microlithography XXXII
Vladimir A. Ukraintsev, Editor(s)

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