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Proceedings Paper

Advancing silicon photonics by germanium ion implantation into silicon
Author(s): Graham T. Reed; Xia Chen; Milan M. Milosevic; Wei Cao; Callum Littlejohns; Ali Z. Khokhar; Yohann Franz; Antoine F. J. Runge; Sakellaris Mailis; David J. Thomson; Anna C. Peacock
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Paper Abstract

We review our recent developments of the trimming techniques for correcting the operating point of ring resonator and Mach-Zehnder Interferometers (MZIs). This technology has been employed to fine-tune the effective index of waveguides, and therefore the operating point of photonic devices, enabling permanent correction of optical phase error induced by fabrication variations. Large resonance wavelength shift of ring resonators was demonstrated, and the shift can be tuned via changing the laser power used for annealing. A higher accuracy trimming technique with a scanning laser was also demonstrated to fine-tune the operating point of integrated MZIs. The effective index change of the optical mode is up to 0.19 in our measurements, which is approximately an order of magnitude improvement compared to previous work, whilst retaining similar excess optical loss.

Paper Details

Date Published: 22 February 2018
PDF: 7 pages
Proc. SPIE 10536, Smart Photonic and Optoelectronic Integrated Circuits XX, 105361T (22 February 2018); doi: 10.1117/12.2292199
Show Author Affiliations
Graham T. Reed, Univ. of Southampton (United Kingdom)
Xia Chen, Univ. of Southampton (United Kingdom)
Milan M. Milosevic, Univ. of Southampton (United Kingdom)
Wei Cao, Univ. of Southampton (United Kingdom)
Callum Littlejohns, Univ. of Southampton (United Kingdom)
Nanyang Univ. of Technology (Singapore)
Ali Z. Khokhar, Univ. of Southampton (United Kingdom)
Yohann Franz, Univ. of Southampton (United Kingdom)
Antoine F. J. Runge, Univ. of Southampton (United Kingdom)
Sakellaris Mailis, Univ. of Southampton (United Kingdom)
David J. Thomson, Univ. of Southampton (United Kingdom)
Anna C. Peacock, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 10536:
Smart Photonic and Optoelectronic Integrated Circuits XX
Sailing He; El-Hang Lee, Editor(s)

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