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Proceedings Paper

Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules
Author(s): Hye Jin Kim; Dong-Hoon Kang; Eunji Lee; Kyo Seon Hwang; Hyun-Joon Shin; Jinsik Kim
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Paper Abstract

We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO2 layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO2 and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size.

Paper Details

Date Published: 12 February 2018
PDF: 8 pages
Proc. SPIE 10484, Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI, 104840I (12 February 2018); doi: 10.1117/12.2291359
Show Author Affiliations
Hye Jin Kim, Korea Univ. (Korea, Republic of)
Kyung Hee Univ. (Korea, Republic of)
Dong-Hoon Kang, Korea Institute of Science and Technology (Korea, Republic of)
Eunji Lee, Dongguk Univ. (Korea, Republic of)
Kyo Seon Hwang, Kyung Hee Univ. (Korea, Republic of)
Hyun-Joon Shin, Korea Institute of Science and Technology (Korea, Republic of)
Jinsik Kim, Dongguk Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 10484:
Advanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XVI
Tuan Vo-Dinh; Anita Mahadevan-Jansen; Warren S. Grundfest M.D., Editor(s)

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