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Proceedings Paper

Fabricating a 2D imaging device using aerosol PZT process
Author(s): Wei-Chih Wang; Peng-Jyun Chen; Yu-Hsin Chiang; Chao-Ting Chen; Wen-Jong Wu
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Paper Abstract

Here we present a new rapid prototyped PZT MEMS actuator for potential 2D scanning endoscopic application. The proposed 6.1 mm x 7.1 mm x 5 μm thick film PZT push-pull actuator made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear 2D vibration using 1-D actuation. Initial fabrication results, electrical impedance, mechanical will be presented and discussed.

Paper Details

Date Published: 22 February 2018
PDF: 7 pages
Proc. SPIE 10544, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI, 105440Q (22 February 2018); doi: 10.1117/12.2291353
Show Author Affiliations
Wei-Chih Wang, National Tsing Hua Univ. (Taiwan)
Univ. of Washington (United States)
Peng-Jyun Chen, National Tsing Hua Univ. (Taiwan)
Yu-Hsin Chiang, National Tsing Hua Univ. (Taiwan)
Chao-Ting Chen, National Taiwan Univ. (Taiwan)
Wen-Jong Wu, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 10544:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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