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Proceedings Paper

1 million-Q optomechanical microdisk resonators for sensing with very large scale integration
Author(s): M. Hermouet; M. Sansa; L. Banniard; A. Fafin; M. Gely; P. E. Allain; E. Gil Santos; I. Favero; T. Alava; G. Jourdan; S. Hentz
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Paper Abstract

Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. In this study, we demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for sensing applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors, yielding high displacement sensitivity and strong coupling between optical WGMs and in-plane mechanical Radial Breathing Modes (RBM). Such high-Q microdisks with mechanical resonance frequencies in the 102 MHz range were fabricated on 200 mm wafers with Variable Shape Electron Beam lithography. Benefiting from ultrasensitive readout, their Brownian motion could be resolved with good Signal-to-Noise ratio at ambient pressure, as well as in liquid, despite high frequency operation and large fluidic damping: the mechanical quality factor reduced from few 103 in air to 10’s in liquid, and the mechanical resonance frequency shifted down by a few percent. Proceeding one step further, we performed an all-optical operation of the resonators in air using a pump-probe scheme. Our results show our VLSI process is a viable approach for the next generation of sensors operating in vacuum, gas or liquid phase.

Paper Details

Date Published: 19 February 2018
PDF: 4 pages
Proc. SPIE 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI, 104910C (19 February 2018); doi: 10.1117/12.2290322
Show Author Affiliations
M. Hermouet, Univ. Grenoble Alpes (France)
CEA-LETI (France)
M. Sansa, Univ. Grenoble Alpes (France)
CEA-LETI (France)
L. Banniard, Univ. Grenoble Alpes (France)
CEA-LETI (France)
A. Fafin, Univ. Grenoble Alpes (France)
CEA-LETI (France)
Univ. Paris Diderot (France)
M. Gely, Univ. Grenoble Alpes (France)
CEA-LETI (France)
P. E. Allain, Univ. Paris Diderot (France)
E. Gil Santos, Univ. Paris Diderot (France)
I. Favero, Univ. Paris Diderot (France)
T. Alava, Univ. Grenoble Alpes (France)
CEA-LETI (France)
G. Jourdan, Univ. Grenoble Alpes (France)
CEA-LETI (France)
S. Hentz, Univ. Grenoble Alpes (France)
CEA-LETI (France)

Published in SPIE Proceedings Vol. 10491:
Microfluidics, BioMEMS, and Medical Microsystems XVI
Bonnie L. Gray; Holger Becker, Editor(s)

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