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Proceedings Paper

A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy
Author(s): Kaustubh Banerjee; Pouya Rajaeipour; Çağlar Ataman; Hans Zappe
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Paper Abstract

A low-cost, compact electrostatic deformable mirror is developed using widely available polymeric materials. The fabrication method offers exceptional post-fabrication mirror flatness error of < 250 nm RMS, which can be reduced below 22 nm at best-flat. A custom real-time control system is also constructed and high fidelity reconstruction of Zernike modes up to the 4th radial order is presented. Real-time wavefront correction is also demonstrated using a spatial-carrier laser interferometer as a wavefront sensor.

Paper Details

Date Published: 22 February 2018
PDF: 9 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450G (22 February 2018); doi: 10.1117/12.2288780
Show Author Affiliations
Kaustubh Banerjee, Univ. of Freiburg (Germany)
Pouya Rajaeipour, Univ. of Freiburg (Germany)
Çağlar Ataman, Univ. of Freiburg (Germany)
Hans Zappe, Univ. of Freiburg (Germany)

Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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