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Proceedings Paper

Laser-induced forward transfer with optical stamp for high-quality film printing (Conference Presentation)

Paper Abstract

For high quality film printing, we have newly developed a laser-induced forward transfer with optical stamp (shortly, LIFTop), that consists of a two-step transfer process. In the first step, functional films were transferred onto a transparent polymer having high adhesiveness and elasticity like PDMS, which we call “optical stamp”. This stamp helps to avoid the transferred film from pattern spread and fracture. Then, the transferred micro-pattern on the optical stamp was further transferred onto a final target. In this talk, metal and transparent conductive oxide film transfer was demonstrated using our new LIFT process.

Paper Details

Date Published: 14 March 2018
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Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190O (14 March 2018); doi: 10.1117/12.2288695
Show Author Affiliations
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 10519:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII
Beat Neuenschwander; Costas P. Grigoropoulos; Tetsuya Makimura; Gediminas Račiukaitis, Editor(s)

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