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Proceedings Paper

Beam shaping optics to enhance performance of interferometry techniques in grating manufacture
Author(s): Alexander Laskin; Vadim Laskin; Aleksei Ostrun
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Paper Abstract

Improving of industrial holographic and interferometry techniques is of great importance in interference lithography, computer-generated holography, holographic data storage, interferometry recording of Bragg gratings as well as gratings of various types in semiconductor industry. Performance of mentioned techniques is essentially enhanced by providing a light beam with flat phase front and flat-top irradiance distribution. Therefore, transformation of Gaussian distribution of a TEM00 laser to flat-top (top hat, uniform) distribution is an important optical task. There are different refractive and diffractive beam shaping approaches used in laser industrial and scientific applications, but only few of them are capable to fulfil the optimum conditions for beam quality demanding holography and interferometry. As a solution it is suggested to apply refractive field mapping beam shaping optics πShaper, which operational principle presumes almost lossless transformation of Gaussian to flat-top beam with flatness of output wavefront, conserving of beam consistency, providing collimated low divergent output beam, high transmittance, extended depth of field, negligible wave aberration, and achromatic design provides capability to work with several lasers with different wavelengths simultaneously. High optical quality of resulting flat-top beam allows applying additional optical components to build various imaging optical systems for variation of beam size and shape to fulfil requirements of a particular application. This paper will describe design basics of refractive beam shapers and optical layouts of their applying in holography and laser interference lithography. Examples of real implementations and experimental results will be presented as well.

Paper Details

Date Published: 20 February 2018
PDF: 11 pages
Proc. SPIE 10513, Components and Packaging for Laser Systems IV, 105130F (20 February 2018); doi: 10.1117/12.2287528
Show Author Affiliations
Alexander Laskin, AdlOptica GmbH (Germany)
Vadim Laskin, AdlOptica GmbH (Germany)
Aleksei Ostrun, St. Petersburg National Research Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10513:
Components and Packaging for Laser Systems IV
Alexei L. Glebov; Paul O. Leisher, Editor(s)

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