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Proceedings Paper

Silicon nitride photonics: from visible to mid-infrared wavelengths
Author(s): Gloria Micó; Luis A. Bru; Daniel Pastor; David Doménech; Juan Fernández; Ana Sánchez; Josep M. Cirera; Carlos Domínguez; Pascual Muñoz
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Paper Abstract

Silicon nitride has received a lot of attention during the last ten years, for applications such as bio-photonics, tele/datacom, optical signal processing and sensing. In this paper, firstly an updated review of the state of the art of silicon nitride photonics integration platforms will be provided. Secondly, our developments on a moderate confinement Si3N4 platform in the near-infrared will be presented. Finally, our steps towards establishing a Si3N4 based platform for broadband operation spanning from visible to mid-infrared wavelengths will be introduced.

Paper Details

Date Published: 22 February 2018
PDF: 9 pages
Proc. SPIE 10537, Silicon Photonics XIII, 105370B (22 February 2018); doi: 10.1117/12.2287421
Show Author Affiliations
Gloria Micó, Univ. Politècnica de València (Spain)
Luis A. Bru, Univ. Politècnica de València (Spain)
Daniel Pastor, Univ. Politècnica de València (Spain)
David Doménech, VLC Photonics (Spain)
Juan Fernández, VLC Photonics (Spain)
Ana Sánchez, Ctr. Nacional de Microelectrónica, Institut de Microelectrònica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
Josep M. Cirera, Ctr. Nacional de Microelectrónica, Institut de Microelectrònica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
Carlos Domínguez, Ctr. Nacional de Microelectrónica, Institut de Microelectrònica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
Pascual Muñoz, Univ. Politècnica de València (Spain)


Published in SPIE Proceedings Vol. 10537:
Silicon Photonics XIII
Graham T. Reed; Andrew P. Knights, Editor(s)

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