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Proceedings Paper

Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging
Author(s): Bin Guo; Antti Näsilä; Roberts Trops; Tahvo Havia; Ingmar Stuns; Heikki Saari; Anna Rissanen
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Paper Abstract

Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.

Paper Details

Date Published: 22 February 2018
PDF: 9 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450U (22 February 2018);
Show Author Affiliations
Bin Guo, VTT Technical Research Ctr. of Finland (Finland)
Antti Näsilä, VTT Technical Research Ctr. of Finland (Finland)
Roberts Trops, VTT Technical Research Ctr. of Finland (Finland)
Tahvo Havia, VTT Technical Research Ctr. of Finland (Finland)
Ingmar Stuns, VTT Technical Research Ctr. of Finland (Finland)
Heikki Saari, VTT Technical Research Ctr. of Finland (Finland)
Anna Rissanen, VTT Technical Research Ctr. of Finland (Finland)

Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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