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Proceedings Paper

Design of a micromachined pressure sensor for endoscopic graspers
Author(s): Manish Mehta; M. Parameswaran; Shahram Payandeh
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Paper Abstract

A micromachined pressure sensor that is suitable for integrating on the tip of the grasper of an endoscopic surgical instrument is presented. Device operation to detect the pressure applied on the body tissues during endoscopic surgery is based on the change in the capacitance between a 5 micrometers thin boron doped silicon membrane and 1 micrometers thick Aluminium electrodes sputtered inside 15 micrometers deep cavities etched in glass. The design, structural optimization for obtaining high sensitivity and the fabrication process for the device are presented. The device has a peak sensitivity of 500 pFmm2/N. The range of the pressure sensor is from 0.01 N/mm2 up to 0.1 N/mm2 which is suitable for measuring the pressure on various tissues inside the body during endoscopic surgery. Since the device simulates the teeth like surface of the existing grasper it is possible to integrate the device on the tip of the grasper of the endoscopic surgical instrument.

Paper Details

Date Published: 18 December 1995
PDF: 7 pages
Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228637
Show Author Affiliations
Manish Mehta, Simon Fraser Univ. (Canada)
M. Parameswaran, Simon Fraser Univ. (Canada)
Shahram Payandeh, Simon Fraser Univ. (Canada)

Published in SPIE Proceedings Vol. 2593:
Microrobotics and Micromechanical Systems
Lynne E. Parker, Editor(s)

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