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Proceedings Paper

A method for improving the measurement accuracy of lateral shearing interferometry
Author(s): Jie Li; Feng Tang; Xiangzhao Wang; Rongsheng Ba; Xinda Zhou; Yinbo Zheng; Lei Ding; Bo Chen; Xiaoyu Yang; Jing Yuan
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Paper Abstract

A systematic error calibration method is presented to improve the measurement accuracy of lateral shearing interferometry (LSI). This method is used to remove the most significant errors: geometric optical path difference (OPD) and detector tilt error. Difference fronts in the 0° and 90° directions are used to reconstruct wavefront using difference Zernike polynomial fitting. And difference fronts in the 45° and 135° directions are also used to reconstruct wavefront. The coefficient differences between the reconstructed wavefront are generated from geometric OPD and detector tilt error. The relationship between Zernike coefficient differences and systematic parameters are presented based on shear matrix. Thus, the distance of diffracted light converging point (d) and detector tilt angle can be calculated from the coefficient difference. Based on the calculated d and detector tilt angle, the geometric OPD and detector-tilt induced systematic errors are removed and the measurement accuracy of LSI is improved.

Paper Details

Date Published: 10 January 2018
PDF: 8 pages
Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180P (10 January 2018); doi: 10.1117/12.2286323
Show Author Affiliations
Jie Li, China Academy of Engineering Physics (China)
Feng Tang, Shanghai Institute of Optics and Fine Mechanics (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Rongsheng Ba, China Academy of Engineering Physics (China)
Xinda Zhou, China Academy of Engineering Physics (China)
Yinbo Zheng, China Academy of Engineering Physics (China)
Lei Ding, China Academy of Engineering Physics (China)
Bo Chen, China Academy of Engineering Physics (China)
Xiaoyu Yang, China Academy of Engineering Physics (China)
Jing Yuan, China Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 10618:
2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications
Xuping Zhang; Hai Xiao; Francisco Javier Arregui; Liquan Dong, Editor(s)

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