Share Email Print

Proceedings Paper

Novel micro-fabricated Fabry-Perot filters in infrared
Author(s): Branislav Timotijevic; Andrea Dunbar; Arno Hoogerwerf; Nemanja Niketic; Ross Stanley; Michel Despont
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 μm and 15 μm have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through post processing.

Paper Details

Date Published: 22 February 2018
PDF: 5 pages
Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450I (22 February 2018);
Show Author Affiliations
Branislav Timotijevic, CSEM (Switzerland)
Andrea Dunbar, CSEM (Switzerland)
Arno Hoogerwerf, CSEM (Switzerland)
Nemanja Niketic, CSEM (Switzerland)
Ross Stanley, CSEM (Switzerland)
Michel Despont, CSEM (Switzerland)

Published in SPIE Proceedings Vol. 10545:
MOEMS and Miniaturized Systems XVII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?