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Proceedings Paper

Study on on-machine defects measuring system on high power laser optical elements
Author(s): Chi Luo; Feng Shi; Zhifan Lin; Tong Zhang; Guilin Wang
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Paper Abstract

The influence of surface defects on high power laser optical elements will cause some harm to the performances of imaging system, including the energy consumption and the damage of film layer. To further increase surface defects on high power laser optical element, on-machine defects measuring system was investigated. Firstly, the selection and design are completed by the working condition analysis of the on-machine defects detection system. By designing on processing algorithms to realize the classification recognition and evaluation of surface defects. The calibration experiment of the scratch was done by using the self-made standard alignment plate. Finally, the detection and evaluation of surface defects of large diameter semi-cylindrical silicon mirror are realized. The calibration results show that the size deviation is less than 4% that meet the precision requirement of the detection of the defects. Through the detection of images the on-machine defects detection system can realize the accurate identification of surface defects.

Paper Details

Date Published: 24 October 2017
PDF: 11 pages
Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104572C (24 October 2017);
Show Author Affiliations
Chi Luo, National Univ. of Defense Technology (China)
Feng Shi, National Univ. of Defense Technology (China)
Zhifan Lin, National Univ. of Defense Technology (China)
Tong Zhang, National Univ. of Defense Technology (China)
Guilin Wang, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 10457:
AOPC 2017: Laser Components, Systems, and Applications
Shibin Jiang; Lijun Wang; Lan Jiang; Long Zhang, Editor(s)

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