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Proceedings Paper

Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography
Author(s): Helmut Schift; Robert Kirchner; Nachiappan Chidambaram; Mirco Altana
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Paper Abstract

Two-photon polymerization by direct laser writing enables to write refractive micro-optical elements with sub-μm precision. The trajectories and layering during the direct writing process often result in roughness in the range of the writing increment, which has adverse effects for optical applications. Instead of increasing overlap between adjacent voxels, roughness in the range of 100 nm can be smoothed out by post-processing. For this a method known as TASTE was developed, which allows polishing of surfaces without changing the structural details or the overall shape. It works particularly well with thermoplastic polymers and enables sub-10 nm roughness. The optical quality was confirmed for an array with several 100 microlenses.

Paper Details

Date Published: 2 January 2018
PDF: 9 pages
Proc. SPIE 10456, Nanophotonics Australasia 2017, 104561Z (2 January 2018); doi: 10.1117/12.2283236
Show Author Affiliations
Helmut Schift, Paul Scherrer Institut (Switzerland)
Robert Kirchner, Technische Univ. Dresden (Germany)
Nachiappan Chidambaram, Paul Scherrer Institut (Switzerland)
Mirco Altana, Heptagon Oy (Switzerland)

Published in SPIE Proceedings Vol. 10456:
Nanophotonics Australasia 2017
James W. M. Chon; Baohua Jia, Editor(s)

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