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Proceedings Paper

Predicting mask performance by numerical simulation
Author(s): Qi-De Qian; Giang T. Dao; Pei-yang Yan; Francisco A. Leon
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Paper Abstract

In this paper, we present a method for linking a finite element Maxwell's equation solver with a scalar lithography simulator, iPHOTO-II. The combined simulator takes the mask topography and the stepper parameters as input and simulates the resist profile on the wafer plane. The accuracy of the simulator is demonstrated by comparing simulation results with experimental data over a wide range of focus, exposure and mask dimensions. The simulator is used to predict the performance of a phase edge phase shift mask. It is revealed that the true position of the line center in a phase edge PSM is shifted slightly from the location given by geometric projection. Biasing rules for compensating for this location shift are presented.

Paper Details

Date Published: 8 December 1995
PDF: 7 pages
Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); doi: 10.1117/12.228201
Show Author Affiliations
Qi-De Qian, Intel Corp. (United States)
Giang T. Dao, Intel Corp. (United States)
Pei-yang Yan, Intel Corp. (United States)
Francisco A. Leon, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 2621:
15th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James N. Wiley, Editor(s)

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