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Proceedings Paper

Robust, sub-angstrom-level midspatial-frequency profilometry
Author(s): Paul E. Glenn
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Paper Abstract

The paper indicates the emerging requirements for profilometry instruments for use in the fabrication and characterisation of modern optical systems. Important design principles are covered, together with some of the problems which can be experienced. Examples of a number of systems recently developed are given both stand alone systems and those which operate insitu to the machining process.

Paper Details

Date Published: 1 November 1990
PDF: 8 pages
Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22802
Show Author Affiliations
Paul E. Glenn, Bauer Associates, Inc. (United States)

Published in SPIE Proceedings Vol. 1333:
Advanced Optical Manufacturing and Testing
Gregory M. Sanger; Paul B. Reid; Lionel R. Baker, Editor(s)

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