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Proceedings Paper

Novel noncontact profiler design for measuring synchrotron radiation mirrors
Author(s): Yao Lin; Peter Z. Takacs; Karen Furenlid; Robert A. DeBiasse; Runwen Wang
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Paper Abstract

A novel optical profiler is described in this paper for measurement of surface profiles of synchrotron radiation (SR) mirrors. The measurement is based on a combination of an optical heterodyne technique and a precise phase measurement procedure without a reference surface. A Zeeman two-frequency He-Ne laser is employed as the light source. The common-path optical system, which uses a birefringent lens as the beam splitter, minimizes the effects of air turbulence, sample vibration and temperature variation. A special autofocus system allows the profiler to measure the roughness and shape of a sample surface. The optical system is mounted on a large linear air-bearing slide, and is capable of scanning over distances covering the spatial period range from several microns to nearly one meter with a high measurement accuracy.

Paper Details

Date Published: 1 November 1990
PDF: 7 pages
Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22800
Show Author Affiliations
Yao Lin, Brookhaven National Lab. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)
Karen Furenlid, Brookhaven National Lab. (United States)
Robert A. DeBiasse, Brookhaven National Lab. (United States)
Runwen Wang, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1333:
Advanced Optical Manufacturing and Testing
Gregory M. Sanger; Paul B. Reid; Lionel R. Baker, Editor(s)

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